rubi3
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Rubi3

①12”涂胶显影机。

②Si or Glass, SOC, SOD,Polymide coating and develop ,inline模式。

Rubi3产品定义

 

wafer sizes 300mm 12
Max number of load port 4  
Max number of spinners 8 [根据产能需求适配]
Max number of thermal modules 24 [根据产能需求适配]
Process Iline, KrF ArF,PI  
Substrates Si/SiC/glass  
T&H control Temperature = 23±01℃
Relatively Humidity = 45±19%
[依客户定制]
PR PUMP SPEC PRYIscoslty
Dispense Volume Range
[MAX 10,000cp]
[0.5cc ~ 8.0cc(≤200cp)]
[1.0cc ~ 10.0cc(200 - 10,000cp)]
spin motor spec Spinning speed range:0,10-6000rpm
Acceleration range:100-10000rpm/s
accuracy:±1rpm
 
COT max pr nozzles
EBR accuracy
BSR(2 set per CUP)
RRC
PR/EBR SUCK BACK
Cup Wash
[G]
[1.0~10.0mm±0.2mm]
DEV DEV nozzle type
RINSE
BSR(2 set per CUP)
[H,SH,LD,STREAM,GP]